| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater unit capable of heating a circuit board under the same condition as an actual reflow furnace and preferably adapted to the X-ray analysis of the heated circuit board. SOLUTION: The heater unit 10 is equipped with a heater 11 made of silicon carbide, an X-ray source 19a for emitting X rays in the direction of transmission through the heater 11 made of silicon carbide or the object S to be heated, which is heated by the heater 11 made of silicon carbide and the light receiving part 19b provided in the direction receiving the X rays emitted from the X-ray source 19a. COPYRIGHT: (C)2009,JPO&INPIT |
