| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply device capable of reducing possibility of generating metal impurities from the gas supply device as compared with a conventional one, and of improving productivity; a semiconductor manufacturing device; and a component for a gas supply device. SOLUTION: A connecting block 22 of this gas supply device 1 includes: a corrosion-resistant block member 22a formed of a ceramic or a noble metal having corrosion resistance against gas, and constituting a gas contact part in contact with gas; and a metallic block member 22b having a fitting hole 28 for fitting the corrosion-resistant block member 22a thereto, arranged to surround the circumference of the corrosion-resistant block member 22a, and protecting the corrosion-resistant block member 22a. COPYRIGHT: (C)2009,JPO&INPIT
|
