| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavefront aberration measuring device capable of measuring the wavefront aberration of an optical system under test by a relatively simple constitution without using an interferometry. SOLUTION: This wavefront aberration measuring device for measuring the wavefront aberration of the optical system under test 20 comprises a point source 3a:1-3 for supplying measurement light, a photodetector 7 having a detector plane disposed at a position optically conjugate to the point source, a wavefront change giving unit 5 that is disposed in an optical path between the point source and the photodetector and gives a change in wavefront to the light which has passed the optical system under test, and a measuring unit 6 for measuring the wavefront aberration of the optical system under test on the basis of the output of the photodetector and the change in wavefront given by the wavefront change giving unit. COPYRIGHT: (C)2009,JPO&INPIT |
