| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a film wherein oxygen shortage scarcely occurs when an oxide film is formed by an ALD method. <P>SOLUTION: When a workpiece is inserted into a treatment container which can be held vacuum, the inside of the treatment container is held in a vacuum state, and the step of supplying film forming raw material therein (step S1) and the step of supplying oxidant therein (step S2) are repeated two or more times to form an oxide film on a substrate, the step of supplying oxidant (step S2) repeats the supply of the oxidant two or more times with the vacuum suction being interposed between the successive supplies. <P>COPYRIGHT: (C)2009,JPO&INPIT |
