| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of highly accurate measurement of an object to be inspected depending on a surface shape of the object by using a difference in focuses due to chromatic aberration, and to provide a method of measuring the same. SOLUTION: The measuring device 1 includes an image sensor 20 having a plurality of pixels 21, a coloring lens 11 for forming an image of a surface of the object 8 to be inspected on the image sensor, a zooming driver 11a capable of enlarging or reducing the image by moving at least part of lenses constituting the coloring lens 11 in the direction of an optical axis, and an arithmetic processing unit 30 for calculating a relative position in the optical axis direction on the surface of the object for measuring a three-dimensional shape of the object based on intensity of light received by each of pixel regions while the image of the surface of the object is enlarged or reduced by the zooming driver 11a and formed on the image sensor 20. COPYRIGHT: (C)2009,JPO&INPIT
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