| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method of a semiconductor integrated circuit for inspecting a circuit having various constitutions without increasing terminals required for implementing an inspection. SOLUTION: Switch circuits 4, 6 and a constant current source 7 are provided in an operational amplifier 1. A constant current source 5 for supplying a constant current during a normal operation is switched by a signal from an external apparatus through a control signal terminal 8. When a power supply voltage of the operational amplifier 1 is set to a normal voltage level VB, a slew rate is measured in a state that a micro constant current is supplied. When the power supply voltage is set to an inspection voltage VT, the constant current during the normal operation is supplied in a state that a voltage corresponding to the inspection voltage VT is applied across a phase compensation capacitor 14. The slew rate is measured again on the same condition as the initial measurement. The measured results before and after an application of the inspection voltage VT are compared, and the quality is determined. COPYRIGHT: (C)2009,JPO&INPIT
|
