METHOD AND APPARATUS FOR PERFORMING DUMMY-FILL BY USING A SET OF DUMMY-FILL CELLS

摘要

An embodiment performs dummy fill in a design layout to achieve a target density within a narrow range of target densities. During operation, the system receives a design layout that includes a region whose density is not within a desired range of target densities. Next, the system receives a set of dummy-fill cells which can be used to place a dummy-fill array to fill an arbitrarily sized rectangle. The dummy-fill cells may contain assist features and optical proximity corrections which cause the dummy shapes to print properly regardless of the size of the dummy-fill array. The system then determines a polygon in the design layout to fill with dummy-fill cells. Next, the system fractures the polygon into a set of rectangles. The system uses the set of dummy-fill cells to place a dummy-fill array that fills a rectangle.