| 摘要 |
<p>A positioning apparatus, exposure apparatus and device manufacturing method are provided to use a plurality of current supply paths and detect disconnection of the current supply path of the actuator. The stage(1) can be moved in the table. The actuator(2) operates the stage. The current supply path(42) is connected between the driver and the actuator. The current detector is installed at a part of the current supply path. The current supply path has a plurality of routes. The current detector detects the disconnection of the current supply path.</p> |
