发明名称 METHOD AND OPTICAL ASSEMBLY FOR ANALYSING A SAMPLE
摘要 A method and an arrangement for analyzing a specimen, wherein the specimen is supported so as to be rotatable around an axis of rotation and displaceable in all three spatial directions and is illuminated by a first illumination device. Light radiated from the specimen is imaged on a detection device. A plurality of sectional images of the specimen are recorded at different settings of the rotational angle, and the specimen is rotated. The recorded sectional images are fused to form a data set of spatial image data of the specimen. The specimen is then illuminated by a second illumination device perpendicular to the axis of rotation, wherein a plurality of shadow images of the specimen are recorded and the specimen is rotated. A second data set of spatial image data of the specimen is constructed from the recorded shadow images by means of a back projection algorithm.
申请公布号 US2010309548(A1) 申请公布日期 2010.12.09
申请号 US20080680265 申请日期 2008.09.18
申请人 CARL ZEISS MICROLMAGING GMBH 发明人 POWER CHRISTOPHER;LIPPERT HELMUT;CHRISTIAN DIETRICH;RADT BENNO
分类号 G02B21/06 主分类号 G02B21/06
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