METHOD FOR CARBURIZING TANTALUM MEMBER, AND TANTALUM MEMBER

摘要

Disclosed is a method for carburizing a tantalum member, wherein a tantalum member can be uniformly carburized, while experiencing little deformation due to the carburization and having good flatness in a flat portion. Specifically disclosed is a method for carburizing a tantalum member (1) that has a flat portion (1a) and is formed from tantalum or a tantalum alloy, wherein carbon is made to permeate into the tantalum member (1) from the surface thereof toward the inside thereof. The method is characterized by comprising: a step in which the tantalum member (1) is arranged within a chamber (3), in which a carbon source is present, by supporting the flat portion (1a) with a plurality of support rods (6) each having a tapered tip portion (6a); and a step in which the tantalum member (1) is carburized by having carbon from the carbon source permeate into the tantalum member (1) through the surface thereof by reducing the pressure within the chamber (3) and heating the inside of the chamber (3).