Gas discharge laser electrode

摘要

An electrode for a gas discharge laser, the electrode comprising: an elongated electrode center base upper portion comprising a first electrode material defining a first electrode material erosion rate under the action of an electric discharge between the electrode and an opposing electrode in a laser gas comprising a halogen; the elongated electrode center base upper portion having a facing portion having a curvilinear surface; and a pair of elongated electrode side portions (24,26) comprising a second electrode material defining a second electrode material erosion rate, under the action of said electric discharge in said laser gas being greater than the first electrode material erosion rate, the elongated electrode side portions being respectively located on each side of the electrode center base upper portion; the elongated electrode side portions comprising curvilinear portions forming an extension of the facing portion of the elongated electrode center base upper portion; the electrode having an elongated electrode center base portion (22) integral with the elongated electrode center base upper portion and laterally wider than the elongated electrode center base upper portion.