| 摘要 |
PURPOSE: A variable capacitor is provided to generate electrostatic attractive force a fixed electrode and a movable electrode by applying a driving voltage to the fixed electrode and the movable electrode. CONSTITUTION: A fixed electrode(12) or a movable electrode(13) is formed on a substrate(11). The fixed electrode includes an opposite side facing the movable electrode. The movable electrode includes an opposite side(13a) facing the fixed electrode. A dielectric pattern(14) is formed on the opposite side of the fixed electrode. The dielectric pattern is comprised of a plurality of islands which are separated from each other on the opposite sides. |
