发明名称 |
ELECTRODES FOR FLUORINE GAS DISCHARGE LASERS |
摘要 |
<p>Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.</p> |
申请公布号 |
EP1661216(A4) |
申请公布日期 |
2010.12.08 |
申请号 |
EP20040778353 |
申请日期 |
2004.07.16 |
申请人 |
CYMER, INC. |
发明人 |
MORTON, RICHARD, G.;MOOSMAN, BRYAN;DYER, TIMOTHY;CARMICHAEL, JAMES, A.;ZHANG, JIPING |
分类号 |
H01S3/038;H01S;H01S3/036;H01S3/097;H01S3/0971;H01S3/22;H01S3/223;H01S3/225 |
主分类号 |
H01S3/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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