| 摘要 |
<p>A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device (25) with precisely formed pole pieces (28, 24) to guide magnetic flux through a coil (44) in a MEMS device layer (94). An example device includes a device layer, a magnetic return path component (84) attached to a first side of the device layer, and a magnet unit (104) attached to a second side of the device layer. The device layer includes a proof mass (32) with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (86) (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.</p> |
