LASER ABLATION APPARATUS AND METHOD FOR MANUFACTURING OPENING USING IT

摘要

PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form the gap pattern on a rear passivation layer through a process simplified further using the laser etching technology in stead of photo etching technology in the process of manufacturing the thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports a silicon substrate of solar battery formed with the rear passivation layer. A laser beam generator(110) generates the laser beat adjusted according to the property of the silicon substrate. A bean forming unit(130) modifies the size and the shape of laser beam spot according to the size and the shape of the aperture.