发明名称 Thin film transistor substrate with divided gate electrode
摘要 In forming a thin film transistor using multi-tone exposure, a wiring width of a foundational wiring is 40 μm or less, and a ratio of a wiring width of a foundational wiring in a dense case to a space between adjacent wirings is 1.7, preferably 1.0 or less.
申请公布号 US7847290(B2) 申请公布日期 2010.12.07
申请号 US20090411799 申请日期 2009.03.26
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 ITOH YASUYOSHI;MASUTANI YUICHI;AOKI MASARU
分类号 H01L33/00 主分类号 H01L33/00
代理机构 代理人
主权项
地址