BUFFER SYSTEM AND SUBSTRATE TRANSFERRING APPARATUS HAVING THE SAME

摘要

PURPOSE: An in-line slide buffer system and a substrate transferring apparatus including the same are provided to load a plurality of substrates in a small space and randomly access each slot. CONSTITUTION: A substrate storage unit(110) includes a plurality of slots which are formed with various angles based on the surface. A substrate inputting and outputting unit(120) loads a substrate on slots of the substrate storage unit and unloads the substrate from the slots of the substrate storage unit. A substrate support is arranged on the transfer route of the substrate. The substrate support arranges the substrate on slots.