ELECTRODE FOR ELECTROSTATIC ATTRACTION, MANUFACTURING METHOD THEREFOR AND SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: An electrostatic absorbing electrode, a method for manufacturing the same, and a substrate processing apparatus are provided to simply obtain both an insulating layer and an electrode layer by forming a first electrode layer and a second electrode layer through a spraying method. CONSTITUTION: A substrate supporting face absorbs a substrate(G) using electrostatic force. An insulating coating(41) is formed on a base through a spraying method. The positive voltage is applied to a first electrode layer(42a). A negative voltage is applied to a second electrode layer(42b). Both the first electrode layer and the second electrode layer are formed on the insulating coating.