PROCESSING METHOD FOR REMOTE PLASMA SOURCE BLOCK

摘要

PURPOSE: A method for processing a remote plasma source block is provided to improve the performance of a remote plasma source block by processing the block using a ball-end mill coated with titanium and diamond, and buffing tools. CONSTITUTION: An inlet(12) is formed on one side of a first block(10). An injecting pipe(14) is formed in the longitudinal direction of a first block. A first connecting pipe(16) is in connection with the one side of the injecting pipe. The injecting pipe and the first connecting pipe form a right angle. An outlet(22) is formed to one side of a second block(20). An ignition plug is installed to an ignition plug installing part(30) in order to ignite a cleaning gas.