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发明名称	ION SOURCE GAS REACTOR
摘要
申请公布号	EP2248145(A1)	申请公布日期	2010.11.10
申请号	EP20090703993	申请日期	2009.01.22
申请人	SEMEQUIP, INC.	发明人	MCINTYRE, EDWARD;GOLDBERG, RICHARD
分类号	H01J37/08;H01J37/317;H01L21/306	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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