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发明名称
ÜBERGANGSMETALLEGIERUNGEN ZUR VERWENDUNG ALS GATEELEKTRODE UND DIESE LEGIERUNGEN ENTHALTENDE BAUELEMENTE
摘要
申请公布号
AT483253(T)
申请公布日期
2010.10.15
申请号
AT20040780760T
申请日期
2004.08.11
申请人
INTEL CORPORATION
发明人
DOCZY, MARK;BAXTER, NATHAN;CHAU, ROBERT;HARKONEN, KARI;LANG, TEEMU
分类号
H01L29/51;C22C14/00;C22C30/00;C22C32/00;H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L29/43;H01L29/49
主分类号
H01L29/51
代理机构
代理人
主权项
地址
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