| 摘要 |
A sheet 200 adapted for fitting in a substrate processing showerhead (100), the sheet including a plurality of orifices (208, 210), wherein boundaries of at least some of the orifices (208) are substantially surrounded by an upstanding wall 212 formed of deformable material. The sheet 200 may be formed from aluminium and the orifices formed by laser drilling. In use, the sheet is fitted between two components of the showerhead, eg a faceplate (302, figs.3,4) and a dividing/baffle plate (304) such that at least some of the upstanding walls 212 are deformed by force transmitted through the components. |
