发明名称 |
Substrate processing apparatus |
摘要 |
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatus 100 having a signal indicator for indicating the running state, including a signal indicator 306 capable of setting at least one operation condition under which the signal indicator 306 operates as well as of operating under any one of a plurality of operation conditions and a display unit 314 capable of displaying that a cause of the operation is any one of the operation conditions during the operation of the signal indicator 306.
|
申请公布号 |
US7808396(B2) |
申请公布日期 |
2010.10.05 |
申请号 |
US20060991093 |
申请日期 |
2006.09.26 |
申请人 |
HITACHI KOKUSAI ELECTRIC, INC. |
发明人 |
IIDA TSUKASA;YONEDA AKIHIKO;INOSHIMA KAORI |
分类号 |
G08B3/00 |
主分类号 |
G08B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|