| 摘要 |
PURPOSE: An imprint pattern forming method is provided to prevent the breakage of resists, since the bending of a template is suppressed and the template is parallel to a substrate. CONSTITUTION: An imprint pattern forming method comprises following steps. A template(102) with patterns contacts the surface of a resist(101), so the resist is filled in the patterns. The resist is formed on a substrate(100). The resist patterns are formed, since the resist filled in the patterns is hardened. Pressure is applied on the rear side of the template, the template is separated from the resist patterns.
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