发明名称 |
BRUSH ASSEMBLY AND APPARATUS FOR CLEANING A SUBSTRATE HAVING THE SAME |
摘要 |
PURPOSE: A brush assembly and a substrate cleaning apparatus having the same are provided to restrain the fall of a body by charging the inner space formed in side the main body along length direction with the compressed gas. CONSTITUTION: A cylindrical main body(110) includes a sealed inner space. A body is installed on the outer surface of the main body. The brush implements the cleaning for the substrate by contacting the surface of the substrate directly. A pair of rotation shafts(130) are supported on both sides of the main body to be rotatable.
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申请公布号 |
KR20100106826(A) |
申请公布日期 |
2010.10.04 |
申请号 |
KR20090025045 |
申请日期 |
2009.03.24 |
申请人 |
SEMES CO., LTD. |
发明人 |
LEE, SUNG HUN;JEON, EUN SU |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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