发明名称 BRUSH ASSEMBLY AND APPARATUS FOR CLEANING A SUBSTRATE HAVING THE SAME
摘要 PURPOSE: A brush assembly and a substrate cleaning apparatus having the same are provided to restrain the fall of a body by charging the inner space formed in side the main body along length direction with the compressed gas. CONSTITUTION: A cylindrical main body(110) includes a sealed inner space. A body is installed on the outer surface of the main body. The brush implements the cleaning for the substrate by contacting the surface of the substrate directly. A pair of rotation shafts(130) are supported on both sides of the main body to be rotatable.
申请公布号 KR20100106826(A) 申请公布日期 2010.10.04
申请号 KR20090025045 申请日期 2009.03.24
申请人 SEMES CO., LTD. 发明人 LEE, SUNG HUN;JEON, EUN SU
分类号 H01L21/302 主分类号 H01L21/302
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