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发明名称
半导体制造装置用保温筒基台（二）
摘要
申请公布号
TWD137063
申请公布日期
2010.09.21
申请号
TW098304187
申请日期
2009.09.04
申请人
东京威力科创股份有限公司
发明人
佐藤泉
分类号
15-99
主分类号
15-99
代理机构
代理人
林秋琴 台北市大安区敦化南路1段245号8楼;何爱文 台北市大安区敦化南路1段245号8楼
主权项
地址
日本
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