发明名称 |
Multi-function module for an electron beam column |
摘要 |
A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
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申请公布号 |
US7800075(B2) |
申请公布日期 |
2010.09.21 |
申请号 |
US20080194220 |
申请日期 |
2008.08.19 |
申请人 |
BULLER BENYAMIN;DEVORE WILLIAM J;FROSIEN JUERGEN;JIANG XINRONG;LOZES RICHARD L;PEARCE-PERCY HENRY THOMAS;WINKLER DIETER;COYLE STEVEN T;BANZHOF HELMUT |
发明人 |
BULLER BENYAMIN;DEVORE WILLIAM J.;FROSIEN JUERGEN;JIANG XINRONG;LOZES RICHARD L.;PEARCE-PERCY HENRY THOMAS;WINKLER DIETER;COYLE STEVEN T.;BANZHOF HELMUT |
分类号 |
G21K1/08;H01J3/14;H01J3/26;H01J49/42 |
主分类号 |
G21K1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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