| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring an error in five degrees of freedom which enables high-accuracy measurement of a movement error in directions of five axes in all which is produced with rotation of a rotating body. SOLUTION: A diffraction grating surface 3 formed of concentric-circle-like grooves is provided in one end face of the rotating body 2. Two-axes interference sensor units S1, S2 and S3 which detect the relative movement displacement of the diffraction grating surface along a first axis of a sensor coordinate system corresponding to the radial direction of a concentric circle and a second axis of the sensor coordinate system corresponding to the normal line direction of the diffraction grating surface, are disposed fixedly at three different positions, at least, spaced from one end face of the rotating body 2 and prevented from overlapping each other, and the movement errorsΔx,Δy,Δz,Δu andΔv in the directions of five axes in all are determined simultaneously, based on interference signals on the first axis of the sensor coordinate system and those of the second axis of the sensor coordinate system of the three two-axes interference sensor units S1, S2 and S3. COPYRIGHT: (C)2011,JPO&INPIT |
