| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction stage where a liquid for a wet process is not sucked into a workpiece suction part protruded from a workpiece. SOLUTION: In the surface of a stage body 12, a suction part forming region which is slightly smaller than the outer form of the maximum workpiece 5a among suction objective workpieces is set. At the inside of the suction part forming region, the part along the outer form of a small size workpiece 5b among the suction part objective workpieces is provided with a partition part 15, and the other part is provided with a porous plate 16. Each porous plate 16 partitioned by the partition part 15 is connected with a flow passage 17 branched from one drawing port 18. When the small size workpiece 5b is held, the outer circumferential edge part thereof and the edge part of a mask 19 covering the porous plate 16 at the outside than the partition part 15 are butted to be placed on the partition part 15, and evacuation is performed from the drawing port 18 in this state, thus the workpiece 5b and the mask 19 are sucked on the porous plates 16 at the inside and outside of the partition part 15, respectively. COPYRIGHT: (C)2011,JPO&INPIT |
