| 摘要 |
<p>Provided are processes such as a photo-imprinting process having high productivity without causing defacement of an expensive mold. In the photo-imprinting process of the invention, a pattern is transferred to a resin layer 2 by forming the resin layer 2 by applying a rework type photocrosslinking/curing resin to a substrate 1, pressing a mold 3 to the resin layer 2, irradiating the resin layer 2 with light having a first wavelength, and detaching the mold 3 from the resin layer 2. The rework type photocrosslinking/curing resin crosslinks/cures by irradiation with light having the first wavelength and is solubilized in a solvent by irradiation with light having a second wavelength shorter than the first wavelength or by heating. Therefore, even if grooves of the mold 3 are obstructed with the crosslinked/cured resin, the crosslinked/cured resin can be easily removed by resolubilizing it by, for example, irradiating the mold 3 with light having the second wavelength.</p> |
