发明名称 Method of forming a dual-plane complementary metal oxide semiconductor
摘要 Embodiments herein present a device, method, etc. for a dual-plane complementary metal oxide semiconductor. The device comprises a fin-type transistor on a bulk silicon substrate. The fin-type transistor comprises outer fin regions and a center semiconductor fin region, wherein the center fin region has a {110} crystalline oriented channel surface. The outer fin regions comprise a strain inducing material that stresses the center semiconductor fin region. The strain inducing material contacts the bulk silicon substrate, wherein the strain inducing material comprises germanium and/or carbon. Further, the fin-type transistor comprises a thick oxide member on a top face thereof. The fin-type transistor also comprises a first transistor on a first crystalline oriented surface, wherein the device further comprises a second transistor on a second crystalline oriented surface that differs from the first crystalline oriented surface.
申请公布号 US7871876(B2) 申请公布日期 2011.01.18
申请号 US20080014850 申请日期 2008.01.16
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ANDERSON BRENT A.;NOWAK EDWARD J.
分类号 H01L21/336;H01L21/70;H01L21/8234;H01L21/8238;H01L27/12;H01L29/04 主分类号 H01L21/336
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