PROCESSING APPARATUS AND ATMOSPHERE EXCHANGE METHOD,申请号KR20080030145-传众专利搜索

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发明名称	PROCESSING APPARATUS AND ATMOSPHERE EXCHANGE METHOD
摘要
申请公布号	KR101017445(B1)	申请公布日期	2011.02.25
申请号	KR20080030145	申请日期	2008.04.01
申请人		发明人
分类号	H01L21/02;H01L21/683	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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