| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing system and a method of manufacturing improving working efficiency, when manufacturing an in-line type substrate processing device. SOLUTION: This manufacturing system of the in-line type substrate processing device is provided for manufacturing the in-line type substrate processing device formed by connecting a plurality of chambers in a vertical row with each unit constituted of at least one chamber. This manufacturing system has a plurality of work spaces 11-17, 21, 22, 31-33, 41, 51-53 and 61 associated with a plurality of manufacturing processes on one unit and arranging a plurality of units, and a plurality of work preparing spaces associated with a plurality of respective processes and used for preparing work with each process, and also has a carrying device carrying the units up to the work spaces corresponding to the next process of the processes from the work spaces corresponding to the processes each time when finishing work in the plurality of work spaces. COPYRIGHT: (C)2011,JPO&INPIT |
