发明名称 |
VAPOR DEPOSITION MASK AND METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING SPONTANEOUS LIGHT EMISSION DISPLAY DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a vapor deposition mask capable of heightening definition of a display device, and to provide a method of manufacturing a spontaneous light emission display device. SOLUTION: The vapor deposition mask includes a mask thin film MP with openings HL1, HL2 penetrating from one face side to the other face side of the mask thin film with formation of a first etching region made by etching of the mask thin film MP from one face side and a second etching region made by etching of the mask thin film MP from the other face side, and with the openings arrayed in a matrix in a row direction and a column direction. The openings are structured of the first opening HL1 and the second opening HL2 having different opening widths in the row direction and/or the column direction. COPYRIGHT: (C)2011,JPO&INPIT
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申请公布号 |
JP2011054290(A) |
申请公布日期 |
2011.03.17 |
申请号 |
JP20090199397 |
申请日期 |
2009.08.31 |
申请人 |
HITACHI DISPLAYS LTD;CANON INC |
发明人 |
OGAWARA TAKESHI;MATSUDATE NORIHARU |
分类号 |
H05B33/10;C23C14/24;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
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主权项 |
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地址 |
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