发明名称 VAPOR DEPOSITION MASK AND METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING SPONTANEOUS LIGHT EMISSION DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition mask capable of heightening definition of a display device, and to provide a method of manufacturing a spontaneous light emission display device. SOLUTION: The vapor deposition mask includes a mask thin film MP with openings HL1, HL2 penetrating from one face side to the other face side of the mask thin film with formation of a first etching region made by etching of the mask thin film MP from one face side and a second etching region made by etching of the mask thin film MP from the other face side, and with the openings arrayed in a matrix in a row direction and a column direction. The openings are structured of the first opening HL1 and the second opening HL2 having different opening widths in the row direction and/or the column direction. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011054290(A) 申请公布日期 2011.03.17
申请号 JP20090199397 申请日期 2009.08.31
申请人 HITACHI DISPLAYS LTD;CANON INC 发明人 OGAWARA TAKESHI;MATSUDATE NORIHARU
分类号 H05B33/10;C23C14/24;H01L51/50 主分类号 H05B33/10
代理机构 代理人
主权项
地址