| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing ultrapure water capable of increasing decomposition and removal of urea in raw water, and stably producing ultrapure water with low TOC concentration. <P>SOLUTION: Raw water containing organic matter, in particular urea, pretreated in a pretreatment system 10 is introduced into a reactor 11, and to which water-soluble bromide and hypochlorite is added to oxidize and decompose urea. The oxidized and decomposed water is passed through an activated carbon column 12 to remove residual hypochlorite, then is passed through a decarbonating column 13 to remove trihalomethane as well as perform decarbonating. Effluent from the decarbonating column 13 is treated in a primary pure water system 20 and a subsystem 30 to produce the ultrapure water. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
