发明名称 |
GLASS SUBSTRATE POLISHING METHOD, PACKAGE MANUFACTURING METHOD, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE AND RADIO TIMEPIECE |
摘要 |
A glass substrate polishing method having polishing processes for polishing a glass substrate surface while supplying a polishing agent. The glass substrate polishing method is characterized in that the polishing processes include a first polishing process in which the surface of the glass substrate is polished using a first polishing pad made from a polishing cloth and a second polishing process in which the surface of the glass substrate is polished using a second polishing pad made from urethane foam.
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申请公布号 |
US2011248788(A1) |
申请公布日期 |
2011.10.13 |
申请号 |
US201113163096 |
申请日期 |
2011.06.17 |
申请人 |
FUJIHIRA YOUICHI;SUGAMA KAZUYOSHI |
发明人 |
FUJIHIRA YOUICHI;SUGAMA KAZUYOSHI |
分类号 |
H03B5/36;B24B1/00;B24B37/08;H01L41/053;H01L41/22 |
主分类号 |
H03B5/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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