发明名称 GLASS SUBSTRATE POLISHING METHOD, PACKAGE MANUFACTURING METHOD, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE AND RADIO TIMEPIECE
摘要 A glass substrate polishing method having polishing processes for polishing a glass substrate surface while supplying a polishing agent. The glass substrate polishing method is characterized in that the polishing processes include a first polishing process in which the surface of the glass substrate is polished using a first polishing pad made from a polishing cloth and a second polishing process in which the surface of the glass substrate is polished using a second polishing pad made from urethane foam.
申请公布号 US2011248788(A1) 申请公布日期 2011.10.13
申请号 US201113163096 申请日期 2011.06.17
申请人 FUJIHIRA YOUICHI;SUGAMA KAZUYOSHI 发明人 FUJIHIRA YOUICHI;SUGAMA KAZUYOSHI
分类号 H03B5/36;B24B1/00;B24B37/08;H01L41/053;H01L41/22 主分类号 H03B5/36
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