| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrode for generating secondary electrons, which can increase the efficiency of secondary electron generation and reduce the aged deterioration of the efficiency of secondary electron generation in comparison to a conventional method. <P>SOLUTION: A method of manufacturing an electrode for generating secondary electrons, which has a secondary electron generating layer on a surface thereof, includes: a diffusion-prevention layer forming step for forming, on a substrate 10, a diffusion-prevention layer 20 to prevent a catalyst metal for forming the secondary electron generating layer 40 from diffusing into the substrate 10; a first catalyst layer forming step for forming a catalyst layer 30 made of the catalyst metal on the diffusion-prevention layer 20; a second catalyst layer forming step for raising the temperature of the substrate 10 to cause the catalyst metal to distribute in island shapes over the diffusion-prevention layer 20; and a secondary electron generating layer forming step for forming the secondary electron generating layer 40 made of magnesium oxide on the diffusion-prevention layer 20 using the catalyst metal as a catalyst. <P>COPYRIGHT: (C)2012,JPO&INPIT |
