| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a target and a target device capable of improving cooling capacity. <P>SOLUTION: The target device includes a buffer section 42 that communicates with a storage section in which target liquid L is stored and accommodates a vapor evaporated from the target liquid L. The buffer section 42 is configured so that a second width part W<SB POS="POST">2</SB>farther from the storage section 41 is larger than a first width part W<SB POS="POST">1</SB>closer to the storage section 41a. Thus, the surface area of a wall surface 42a of the buffer section can be enlarged by expanding the buffer section 42a to the outside in the width direction. This enables condensation heat transfer of vapor V evaporated from the target liquid to be effectively utilized. <P>COPYRIGHT: (C)2012,JPO&INPIT |
