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发明名称
摘要
申请公布号	JP4813009(B2)	申请公布日期	2011.11.09
申请号	JP20030109960	申请日期	2003.04.15
申请人		发明人
分类号	H01S5/028;H01S5/343;B82Y20/00;H01L21/00;H01L21/324;H01S5/00;H01S5/02;H01S5/22;H01S5/223	主分类号	H01S5/028
代理机构		代理人
主权项
地址

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