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发明名称
半导体装置之制造方法及半导体装置
摘要
用以提高采用倒装晶片安装方式之半导体装置之封装步骤之良率。;将利用凸块电极8搭载着基板母体11之构件搭载面上之复数半导体晶片1C,在对模铸装置17之模腔内实施减压之状态下,利用封装用树脂以整体方式进行封装之模铸步骤中,在封装用树脂覆盖树脂注入方向之最终段之半导体晶片1C时,将利用成形模具之下模17a及上模17b夹紧基板母体11时之夹紧压力从封装用树脂之注入初期之相对较低之夹紧压力切换成相对较高之夹紧压力。
申请公布号
TWI360848
申请公布日期
2012.03.21
申请号
TW093135104
申请日期
2004.11.16
申请人
瑞萨电子股份有限公司 日本
发明人
氏家健二;仓富文司
分类号
H01L21/56
主分类号
H01L21/56
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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