| 摘要 |
There is provided a technique that can increase sensitivity of a resonator. A ratio Rb/Ra between an inner diameter Rb and an outer diameter Ra of the resonator 20 is appropriately selected, and thus there may be a fixed point where an r component (U(Ra) or U(Rb)) of displacement in a radial direction and an r component (V(Ra) or V(Rb)) of displacement in a tangential direction are 0 on an outer diameter portion or an inner diameter portion of the resonator 20. In this case, the resonator 20 is supported by a holding member 22 constituted by a single-span beam set so that a boundary condition on a side of the resonator 20 is pinned and a boundary condition on a side of an anchor that supports the resonator 20 is clamped at the fixed point, and this prevents vibration energy of the resonator 20 from being lost through the holding member 22, avoids a state to disturb a vibration mode, and achieves a sensor having high sensitivity. |
