| 发明名称 |
CHEMICAL SENSING AND/OR MEASURING DEVICES AND METHODS |
| 摘要 |
Methods for fabricating silicon nanowire chemical sensing devices, devices thus obtained, and methods for utilizing devices for sensing and measuring chemical concentration of selected species in a fluid are described. Devices may comprise a metal-oxide-semiconductor field-effect transistor (MOSFET) structure.
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| 申请公布号 |
US2012161207(A1) |
申请公布日期 |
2012.06.28 |
| 申请号 |
US20100952181 |
申请日期 |
2010.11.22 |
| 申请人 |
HOMYK ANDREW P.;HENRY MICHAEL D.;SCHERER AXEL;WALAVALKAR SAMEER |
发明人 |
HOMYK ANDREW P.;HENRY MICHAEL D.;SCHERER AXEL;WALAVALKAR SAMEER |
| 分类号 |
H01L29/772;H01L21/336;H01L29/02 |
主分类号 |
H01L29/772 |
| 代理机构 |
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