VACUUM PROCESSING APPARATUS

摘要

PURPOSE: A vacuum processing device is provided to improve process efficiency by shortening time required for the return of a wafer. CONSTITUTION: A standby block(101) comprises a box body(106) equipped with standby transfer vehicle(110). A plurality of cassette platforms(107) is installed at the front side of the box body. A vacuum block(102) comprises a first vacuum transfer chamber(104), a second vacuum transfer chamber(111), and a lock chamber(105). The first vacuum transfer chamber and the second vacuum transfer chamber comprise a vacuum container formed into a rectangular shape. A wafer supporting unit comprises a first vacuum transfer robot and a second vacuum transfer robot.