发明名称 FPD MODULE ASSEMBLING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an FPD module assembling device which is capable of preventing deformation of a panel by moving the panel away from a backup in response to abnormality of processing work. <P>SOLUTION: The FPD module assembling device includes: a plurality of processing units having processing heads for performing various kinds of processing work on a work side of a panel; conveyance stages for conveying the panel to work positions of the plurality of processing units; and panel holding parts which are disposed in the processing units and hold the panel by sucking at least two peripheral edge sides including the work side of the panel. A panel elevating mechanism is provided in each panel holding part to support the panel so that panel can be raised from the work position when abnormality occurs in various kinds of processing work or panel conveyance, and can be lowered to the work position when abnormality is removed. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012203304(A) 申请公布日期 2012.10.22
申请号 JP20110069701 申请日期 2011.03.28
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 YAMAZAKI FUJIO
分类号 G09F9/00;B65G49/06;G02F1/13;H01L21/677 主分类号 G09F9/00
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