Semiconductor device substrate with embedded stress region, and related fabrication methods

摘要

A semiconductor device substrate is presented here. The semiconductor device substrate includes a layer of first semiconductor material having a first lattice constant, a region of second semiconductor material located in the layer of first semiconductor material, and a layer of epitaxially grown third semiconductor material overlying the layer of first semiconductor material and overlying the region of second semiconductor material. The second semiconductor material has a second lattice constant that is different than the first lattice constant. Moreover, the layer of epitaxially grown third semiconductor material exhibits a stressed zone overlying the region of second semiconductor material. The stressed zone has a third lattice constant that is different than the first lattice constant.