| 发明名称 |
METHOD OF ASSEMBLY OF RETAINING RING FOR CMP |
| 摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a retaining ring having a flexible lower portion and a rigid upper portion.
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| 申请公布号 |
US2012325395(A1) |
申请公布日期 |
2012.12.27 |
| 申请号 |
US201213603876 |
申请日期 |
2012.09.05 |
| 申请人 |
ZUNIGA STEVEN M.;OSTERHELD THOMAS H.;APPLIED MATERIALS, INC. A DELAWARE CORPORATION |
发明人 |
ZUNIGA STEVEN M.;OSTERHELD THOMAS H. |
| 分类号 |
B32B43/00;B24B37/04;B24B41/06;B32B37/12;H01L21/304 |
主分类号 |
B32B43/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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