| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection tool and an inspection device capable of suppressing a damage of an inspection object, etc. <P>SOLUTION: An inspection tool 20 and an inspection device 30 are used for an inspection of electric characteristics of an inspection object 10 such as a semiconductor chip. The inspection tool 20 includes: a probe card 100: and an elastic part 150. The probe card 100 includes a probe pin part 120. The elastic part 150 is provided on the surface opposite to the surface on which the probe pin part 120 is provided of the probe card 100. The inspection tool 20 is mounted to an inspection tool mounting place (inspection tool connection part of the inspection device 30) 200 at a state that the elastic part 150 is turned to the inspection tool mounting place 200 and a state that the probe card 100 can be oscillated by an elastic action of the elastic part 150. <P>COPYRIGHT: (C)2013,JPO&INPIT |
