| 摘要 |
PURPOSE: An apparatus and method for coating a fluorescent substance are provided to immediately separate a mask by simultaneously hardening and coating the fluorescent substance. CONSTITUTION: A fluorescent substance is coated on a surface of a wafer(200). Microwaves are outputted on the surface of the wafer. A fluorescent substance coating layer is formed on the surface of the wafer. A chamber(101) receives the wafer. A microwave generation part irradiates the inside of the chamber with the microwaves. |
