| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonator which prevents the damage of a beam part and the breakage of a wiring part while preventing the characteristic deterioration due to anchor loss, enhances the structural strength, and improves the reliability.SOLUTION: A resonator includes: a resonance part 2 held on a substrate where a sacrificial layer is removed through an air gap; a support part 1 supporting the resonance part 2; and a beam pat 30 connecting the resonance part 2 with the support part 1. The beam part 30 is composed of: a narrow beam part 31 connected with the resonance part 2 and formed so as to have a first width; and an extended beam part 32 connected with the support part 1 and formed so as to have a second width wider than the first width. The extended beam part 32 is formed in a step 35 formed by the air gap. |
