发明名称
摘要 PROBLEM TO BE SOLVED: To provide a holding table that improves the efficiency of work and speeds up processing without requiring replacement when a circular workpiece or a rectangular workpiece is a machining target. SOLUTION: A holding face 32a includes a circular-workpiece holding region 33 for holding a circular workpiece 1A, and a rectangular workpiece holding region 35 for holding a rectangular workpiece 1B having four corner parts, which are formed into a concentric shape and into a superposed state. Each four corner-part holding part 36a protrudes from the circular-workpiece holding region 33 so as to be respectively aligned with each of the four corner parts of the rectangular workpiece 1B. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP5244548(B2) 申请公布日期 2013.07.24
申请号 JP20080289525 申请日期 2008.11.12
申请人 发明人
分类号 H01L21/301;B23Q3/08 主分类号 H01L21/301
代理机构 代理人
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